Description
Dopant Concentrations and Thin Film Thickness
Quantitative analysis of thin films, coatings, and buried layers down to sub-atomic equivalent thicknesses and dopants at 10^14 atoms/cm^2 can be obtained through standard-less fundamental parameters or with standards. Thickness variations at the microns-scale can be determined.
Trace Element & Nanoparticle Analysis
The AttoMap provides unprecedented sensitivity of sub-femtogram (and sub-ppm) to measure the distribution of multiple elements simultaneously. Applications include: rare earth elements in geological samples, nanoparticles (e.g. 50-100 nm), metallomics, forensics, contaminants in advanced materials, and more.
Mineralogy for Mining & Oil and Gas
Measurements and elemental imaging to determine co-location of trace-level minerals and rare earth elements at ppm-scale is possible at microns-scale
Quantitative Composition
Elemental composition and their relative percentages can be obtained for both point analysis and for larger regions, including specific regions of interest or the complete sample. Data is acquired and stored as a hypermap, with each pixel and its spectra, for ultimate flexibility in analysis.
COMPARE TO LEADING CONVENTIONAL MICROXRFS:
- Highest resolution: <8-12 um spot
- Highest sensitivity: sub-ppm & sub-femtogram
- Fastest: single minute vs. half a day for equivalent measurements, with up to 100X throughput
- Most accurate quantification, due to achromatic focusing
- Superior sample flexibility for large and heavy samples or uneven sample surfaces
- Correlative capabilities within a single system (includes 2D x-ray microscopy and optical microscopy)
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